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Welcome to Trillium Cryogenics AB, a division of Trillium Inc.

This webpage is under construction and will be launched in the coming months. Stay tuned for updates.

Cryopumps

Trillium is a world leading manufacturer and developer of high performance cryogenic vacuum pumps. Our solutions are ideal when a clean, efficient high vacuum pump is required.  Cryopumps enable such industries as semiconductor manufacturing, optical coating and environmental test as they can generate environments achieving very low pressures. We can supply a large variety of solutions for your specific needs, including integration services and regeneration solutions.

Cryo/Helium compressors

Cryo/Helium compressors are required to allow the operation of cryopumps and cryo coldheads. Trillium manufactures a range of Helium cryocompressors that are suitable for a wide range of cryopumps and cryo coldheads.